Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity applications.
When it comes to semiconductor manufacturing, you need to know that every supplier process, from raw materials selection to final inspection of installed components, is designed to get you from source to exhaust with maximum cleanliness and no contamination. And how you get there is the Swagelok difference.
We continue to push the boundaries of ultrahigh-purity (UHP) valve performance, allowing tool OEMs and integrators to build manufacturing equipment that provides reliable, clean, and consistent flow at high temperatures and speeds. We also provide semiconductor chip fabricators, foundries, and the mechanical contractors and gas/chemical suppliers who support them with a variety of general industrial fluid system products that deliver reliable performance in semiconductor manufacturing applications.
Products for the Semiconductor Industry
Valves Fittings Filters Regulators Hoses Tubing
Valves
Our Bellows-Sealed Valves provide leak-tight performance with a packless design where a seal to atmosphere is especially critical.
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The ALD series features thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
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The patent-pending ALD20 valve design provides the reliability and performance that customers have come to expect of Swagelok. The high flow capacity and thermal stability supported by ALD20 valves make it possible to consistently maintain the high temperatures and minimize pressure drop necessary to quickly deliver a broader range of compounds in a compact footprint.
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The Swagelok ALD7 ultrahigh-purity valve provides the flow consistency and capacity, actuator speed, temperature rating, and cleanliness necessary to help maximize chip throughput in new or existing semiconductor manufacturing tools.
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With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications
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Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.
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DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.
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DF series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available with high-flow end connections.
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Swagelok's check valves can be used in low, medium, and high pressure and are designed to permit fluids to flow in only one direction. These types of valves also are able to control back flow in high purity and general service applications.
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Fittings
VCR® Metal Gasket Face Seal Fittings offer the high purity of a metal-to-metal seal, providing leak-tight service from vacuum to positive pressure. Reassembles reliably every time to minimize maintenance and downtime costs.
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Swagelok offers weld fittings in a variety of materials, sizes, and shapes to suit any industrial or high-purity application. Permanent, high-integrity connections provide strength and reliability in a range of alloys to meet your requirements for quality and corrosion-resistance.
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VCO® O-Ring Face Seal Fittings are engineered for rapid assembly in pipe, tube, and welded systems for general industry, high-pressure, high-purity, and critical vacuum applications. VCO fittings install easily in limited spaces, with no axial clearance required.
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Swagelok tube fittings deliver a leak-tight, gas-tight seal in an easy-to- install, disassemble and reassemble form. The robust tube grip with patented, two-ferrule technology is resistant to vibration fatigue and withstands high pressures and temperature extremes.
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Filters
The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. While the FW series all-welded construction provides reliable fluid containment.
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If your operations require the removal of liquid or particulate contaminants, turn to Swagelok filters for reliable, repeatable results.
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Regulators
The Swagelok® HF series manual gas pressure regulator features a load spring which interacts with a unique pressure-sensing assembly to precisely control outlet pressure.
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Swagelok® HF series gas pressure regulators use a gas actuated pressure-sensing assembly to precisely control outlet pressure.
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Swagelok's pressure-reducing regulators control outlet pressure by balancing an adjustable spring force against the forces caused by inlet and outlet pressures.
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Swagelok's back-pressure regulators control inlet pressure by balancing an adjustable spring force against the force of the inlet pressure.
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Hoses
Swagelok hose insulation also minimizes heat loss over the length of the hose and keeps the media temperature stable and consistent from beginning to end.
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Convoluted 316L Stainless Steel Braided Hose is constructed of stainless steel for minimal permeation or absorption. The convoluted core allows for flexibility, and limits kinking. Available with a wide variety of end connections. Suitable for high-temperature, vacuum, medium-pressure, corrosive or general-purpose environments.
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Provides chemical compatibility, drainability, and precise flow control. Optional static-dissipative, carbon-black filled core, FDA-compliant and ECE R110 alternative fuel certified hoses for specialty applications. Custom hose lengths, hose covers, and end connections are available.
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Rubber Core Hose Rayon Fiber Reinforced Multi-Purpose push-on hose. Smooth-bore Buna N core. Internal fiber reinforcement enhances hose pressure rating and ensures connection retention. Buna N cover resists abrasion. Bulk hose and end connections available for field assembly; custom assemblies also available.
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Tubing
We manufacture and supply tubing designed to perform and meet the challenges of virtually any industry or application. So you can choose the right Swagelok tubing for your application and move forward with confidence, knowing you’ve purchased the finest components available for the heart of your fluid systems.
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Chemically resistant, translucent, PFA flexible tubing is designed for use with both Swagelok PFA tube fittings and metal Swagelok tube fittings in low-pressure applications.
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Convoluted flexible metal tubing and hose can compensate for misalignment and system reroutes between static connections in vacuum or low-pressure static applications.
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The Swagelok FP Series Hose has the flexibility of all-metal and cleanability of a PTFE-core. This unique hose design will not allow permeation to the atmosphere outside the hose. End connections are welded to the adapter collar.
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Learn more about our products and services
Design and Assembly Services
Receive design consultation and professional assembly of high-quality standard and configurable fluid subsystems constructed and tested according to best practices.
Essentials Training
Swagelok® training programs provide a range of valuable and practical tools for meeting day-to-day challenges related to fluid system and sampling system design, operation, and maintenance.
Custom Hose Assembly
Find the right hoses for your semiconductor production environment. Our team of certified hose technicians will work with you to design and build the best possible hose for any application. Whether your system calls for insulated hoses for chiller applications to PTFE hose, metal hose and rubber hose options, we have the hose that will meet your needs.