Today's cutting-edge semiconductor chip production processes demand materials and product designs that not only stand up to corrosive gases and extreme temperatures, but also provide precise dosing over tens of millions of cycles. Speed, repeatability, and cleanliness are essential.

The patent-pending ALD20 valve design provides the reliability and performance that customers have come to expect of Swagelok ultrahigh-purity ALD valves while opening up opportunities to work with precursor gas chemistries that were previously challenging. The high flow capacity and thermal stability supported by ALD20 valves make it possible to consistently maintain the high temperatures and minimized pressure drop necessary to quickly deliver a broader range of compounds in a compact footprint.

As a result, semiconductor chip manufacturers adopting the ALD20 can now utilize more low-vapor pressure precursors, achieving the uniform deposition needed to develop today's most advanced technology and discovering competitive advantages for tomorrow.

Improved flow. Minimized footprint.

• Designed to extend the limits of ALD valve technology
• 1.5-in. modular-surface mount footprint can deliver a flow rate without requiring
  retooling of existing equipment or additional process changes

• A standard body style ALD20 valve with a slightly larger footprint width
  (1.75 in.)
• Custom set flow coefficients are also available

Unbeatable quality. Designed to fit.

• Available in modular surface-mount configurations with two or three ports
• Straight configurations with tube butt weld and male or female VCR® face seal fitting end connections
• Multiport valve configurations to optimize flow paths within existing or new systems
• High-temperature optical position sensor is available as an add-on component

Uncompromising consistency

• Valve and actuator can be fully immersed in a gas box
• Enhanced thermal stability within process lines ensure low-vapor pressure gases are kept at optimal flow
• 316L VIM-VAR stainless steel or Alloy 22 body materials provide enhanced corrosion resistance to withstand increasingly aggressive media
• Highly polished bellows with a 5 μin. Ra finish promotes clean operation over
  an ultrahigh cycle life for process integrity
• Pneumatic actuator can deliver high-speed, repeatable actuation for precise,
  consistent flow to meet dosing requirements

End Connections

• Female VCR fitting (1/2 in.)
• Rotatable male VCR fitting (1/2 in.)
• Tube butt weld, 1/2 in. long (1/2 in. x 0.049 in.)
• Modular surface-mount high flow C-Seal (1.5 in.)

Have Questions?

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