The Swagelok ALD3 and ALD6 series diaphragm valves, fulfill your applications needs with an ultrahigh cycle life and high-speed actuation. The ALD series features thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

ALD3 and ALD6 diaphragms are composed of a cobalt-based superalloy material that provides strength and corrosion resistance; their valve bodies are composed of 316L VIM-VAR stainless steel, making them suitable for ultrahigh-purity applications; and the valve seats are composed of fully fluorinated high-purity PFA to enable a broad range of chemical compatibility and excellent resistance to swelling and contamination.

Ultrahigh-purity ALD3 and ALD6 valves can be set up for normally closed and normally open pneumatic actuation, and they are available in a variety of configurations, including two-port straight and elbow designs; two-, three-, and four-port multiport valves and multivalve manifolds; and two- and three-port modular surface mount valves in 1.125 in. (ALD3 series only) and 1.5 in. platforms. Available thermal actuators, position sensors, solenoids, and optional body holes to accommodate heater cartridges can all provide additional value to a user depending on their specific processes.

Features

• Ultrahigh cycle life with high-speed actuation
• Electronic actuator position-sensing option
• Suitable for ultrahigh-purity applications with 316L VIM-VAR stainless steel body
• VCR®, tube butt weld, and modular surface-mount end connections
• Normally closed and normally open pneumatic actuation
• Two-port straight and elbow configurations
• Two-, three- and four-port multiport valves and multivalve manifolds