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Swagelok Cambridge

Your Authorized Swagelok Sales and Service Center

Push the Limits of ALD Technology

Learn how the ALD20 valve will help enable the next generation of the semiconductor microchip fabrication.

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Find the right fittings for your application.

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Our pressure regulators are the right fit for any fluid solutions situation.

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In the Semiconductor industry, corrosive gases, extreme temperatures, and precision are critical process variables, combined with the ever-increasing need for speed, repeatability, and cleanliness. Count on Swagelok to help you meet your application needs today—and tomorrow. Our innovations continue to advance semiconductor manufacturing. They include ALD diaphragm valves tested to 100 million cycles, DE series springless diaphragm valves, DRP series fluoropolymer valves, benchmark-setting Swagelok VCR and Micro-Fit fittings, photovoltaic components cleaned and packaged for PV processing, and more.

Aggressive Chemistries Require Superior Materials

Cutting-edge processes demand even greater material characteristics. Swagelok‘s stainless steels and special alloys are engineered and blended to offer the maximum corrosion resistance, strength, and ductility. Our fluoropolymers offer stability at high temperatures, as well as chemical and corrosion resistance.

Supply Chain Control for Superior Cleanliness

We source and manufacture the best materials to ensure consistent quality. We go beyond the expected with processes like passivation and electropolishing for greater material purity. Then we clean and specially package our components to ensure your processes stay clean too.


Valves

Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity applications.

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Our Bellows-Sealed Valves provide leak-tight performance with a packless design where a seal to atmosphere is especially critical.

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The ALD series features thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.

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The patent-pending ALD20 valve design provides the reliability and performance that customers have come to expect of Swagelok. The high flow capacity and thermal stability supported by ALD20 valves make it possible to consistently maintain the high temperatures and minimize pressure drop necessary to quickly deliver a broader range of compounds in a compact footprint.

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With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications

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Swagelok® replaceable-seat, springless diaphragm valves enable easy and repeatable seat replacement while providing a seat seal that protects against chemical and thermal swelling and process chemistry degradation.

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Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.

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DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.

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Swagelok's check valves can be used in low, medium, and high pressure and are designed to permit fluids to flow in only one direction. These types of valves also are able to control back flow in high purity and general service applications.

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Fittings

VCR® Metal Gasket Face Seal Fittings offer the high purity of a metal-to-metal seal, providing leak-tight service from vacuum to positive pressure. Reassembles reliably every time to minimize maintenance and downtime costs.

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Swagelok offers weld fittings in a variety of materials, sizes, and shapes to suit any industrial or high-purity application. Permanent, high-integrity connections provide strength and reliability in a range of alloys to meet your requirements for quality and corrosion-resistance.

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VCO® O-Ring Face Seal Fittings are engineered for rapid assembly in pipe, tube, and welded systems for general industry, high-pressure, high-purity, and critical vacuum applications. VCO fittings install easily in limited spaces, with no axial clearance required.

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Swagelok tube fittings deliver a leak-tight, gas-tight seal in an easy-to- install, disassemble and reassemble form. The robust tube grip with patented, two-ferrule technology is resistant to vibration fatigue and withstands high pressures and temperature extremes.

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Filters

The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. While the FW series all-welded construction provides reliable fluid containment.

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If your operations require the removal of liquid or particulate contaminants, turn to Swagelok filters for reliable, repeatable results.

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Regulators

The Swagelok® HF series manual gas pressure regulator features a load spring which interacts with a unique pressure-sensing assembly to precisely control outlet pressure.

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Swagelok® HF series gas pressure regulators use a gas actuated pressure-sensing assembly to precisely control outlet pressure.

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Swagelok's pressure-reducing regulators control outlet pressure by balancing an adjustable spring force against the forces caused by inlet and outlet pressures.

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Swagelok's back-pressure regulators control inlet pressure by balancing an adjustable spring force against the force of the inlet pressure.

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Hoses

Swagelok hoses are available in custom lengths, in diameters 2 inches and under, and with a wide variety of end connections.

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Convoluted 316L Stainless Steel Braided Hose is constructed of stainless steel for minimal permeation or absorption. The convoluted core allows for flexibility, and limits kinking. Available with a wide variety of end connections. Suitable for high-temperature, vacuum, medium-pressure, corrosive or general-purpose environments.

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Provides chemical compatibility, drainability, and precise flow control. Optional static-dissipative, carbon-black filled core, FDA-compliant and ECE R110 alternative fuel certified hoses for specialty applications. Custom hose lengths, hose covers, and end connections are available.

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Rubber Core Hose Rayon Fiber Reinforced Multi-Purpose push-on hose. Smooth-bore Buna N core. Internal fiber reinforcement enhances hose pressure rating and ensures connection retention. Buna N cover resists abrasion. Bulk hose and end connections available for field assembly; custom assemblies also available.

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Convoluted flexible metal tubing and hose can compensate for misalignment and system reroutes between static connections in vacuum or low-pressure static applications.

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The Swagelok FP Series Hose has the flexibility of all-metal and cleanability of a PTFE-core. This unique hose design will not allow permeation to the atmosphere outside the hose. End connections are welded to the adapter collar.

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At Swagelok Cambridge our insulated hoses can help keep your fluid systems running smoothly. These custom made hoses are available with a wide variety of end connections including pre-swaged nuts and ferrules and are built to custom lengths.

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Tubing

We manufacture and supply tubing designed to perform and meet the challenges of virtually any industry or application. So you can choose the right Swagelok tubing for your application and move forward with confidence, knowing you’ve purchased the finest components available for the heart of your fluid systems.

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Chemically resistant, translucent, PFA flexible tubing is designed for use with both Swagelok PFA tube fittings and metal Swagelok tube fittings in low-pressure applications.

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Convoluted flexible metal tubing and hose can compensate for misalignment and system reroutes between static connections in vacuum or low-pressure static applications.

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The Swagelok FP Series Hose has the flexibility of all-metal and cleanability of a PTFE-core. This unique hose design will not allow permeation to the atmosphere outside the hose. End connections are welded to the adapter collar.

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Learn more about our products and services

For more information please contact your fluid solution specialist.